Nonlinear Thermal Drift Compensation IN Hybrid On-Chip Mems Piezoelectric-Capacitive Sensors Using Machine Learning-Assisted Modeling. Int. J. Environ. Sci. [Internet]. 2024 Dec. 20 [cited 2026 Apr. 19];:206-17. Available from: https://theaspd.com/index.php/ijes/article/view/11418